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"Implementing virtual metrology into semiconductor production processes: an ..."
Matthias Koitzsch et al. (2011)
- Matthias Koitzsch, Humbert Noll, Alexander Nemecek, Jochen Merhof, Markus Michl, Alfred Honold, Gerhard Kleineidam, Holger Lebrecht:
Implementing virtual metrology into semiconductor production processes: an investment assessment. WSC 2011: 2022-2033
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