"Automated generation of analytical process time models for cluster tools ..."

Robert Kohn, Oliver Rose (2011)

> Home

Details and statistics

DOI: 10.1109/WSC.2011.6147895

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

- view
  authority control:
- export record
  dblp key:
  - conf/wsc/KohnR11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/wsc/KohnR11
Robert Kohn, Oliver Rose:
Automated generation of analytical process time models for cluster tools in semiconductor manufacturing. WSC 2011: 1808-1820

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.