"Manufacturing intelligence for determining machine subgroups to enhance ..."

Chen-Fu Chien et al. (2011)

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DOI: 10.1109/WSC.2011.6147903

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu, Yi-Hao Yeh:
Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning. WSC 2011: 1898-1907

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