"Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor ..."

Mattia Carletti et al. (2020)

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DOI: 10.1109/WSC48552.2020.9384026

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Mattia Carletti, Marco Maggipinto, Alessandro Beghi, Gian Antonio Susto, Natalie Gentner, Yao Yang, Andreas Kyek:
Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor Manufacturing. WSC 2020: 1875-1885

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