"A Method for Cycle Time Estimation of Semiconductor Manufacturing Toolsets ..."

Raha Akhavan-Tabatabaei, Shengwei Ding, J. George Shanthikumar (2009)

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DOI: 10.1109/WSC.2009.5429165

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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Raha Akhavan-Tabatabaei, Shengwei Ding, J. George Shanthikumar:
A Method for Cycle Time Estimation of Semiconductor Manufacturing Toolsets with Correlations. WSC 2009: 1719-1729

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