"Study on a-Si: H and SiNx films for tunable filter."

Qianfeng Wang et al. (2016)

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DOI: 10.1109/WOCC.2016.7506631

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Qianfeng Wang, Shuang Liu, Haihua Tang, Xiang Zhou, Yijun Xie, Shang-Jian Zhang, Zhiyong Zhong, Yong Liu:
Study on a-Si: H and SiNx films for tunable filter. WOCC 2016: 1-4

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