"Precise visual inspection for LSI wafer patterns using subpixel image ..."

Takashi Hiroi et al. (1994)

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DOI: 10.1109/ACV.1994.341284

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Takashi Hiroi, Shunji Maeda, Hitoshi Kubota, Kenji Watanabe, Yasuo Nakagawa:
Precise visual inspection for LSI wafer patterns using subpixel image alignment. WACV 1994: 26-34

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