"AlN Sputtering Parameter Estimation Using A Multichannel Parallel DCT ..."

Yingyi Luo et al. (2024)

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DOI: 10.1109/VTS60656.2024.10538771

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-03

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Yingyi Luo, Talha M. Khan, Emadeldeen Hamdan, Xin Zhu, Hongyi Pan, Didem Ozevin, A. Enis Çetin:
AlN Sputtering Parameter Estimation Using A Multichannel Parallel DCT Neural Network. VTS 2024: 1-5

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