"Comprehensive investigation of gate oxide short in FinFETs."

Roya Dibaj, Dhamin Al-Khalili, Maitham Shams (2017)

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DOI: 10.1109/VTS.2017.7928960

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Roya Dibaj, Dhamin Al-Khalili, Maitham Shams:
Comprehensive investigation of gate oxide short in FinFETs. VTS 2017: 1-6

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