"First Demonstration of Work Function-Engineered BEOL-Compatible IGZO ..."

Zijie Zheng et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185355

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type: Conference or Workshop Paper

metadata version: 2024-10-25

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Zijie Zheng, Leming Jiao, Zuopu Zhou, Yuxuan Wang, Long Liu, Kaizhen Han, Chen Sun, Qiwen Kong, Dong Zhang, Xiaolin Wang, Kai Ni, Xiao Gong:
First Demonstration of Work Function-Engineered BEOL-Compatible IGZO Non-Volatile MFMIS AFeFETs and Their Co-Integration with Volatile-AFeFETs. VLSI Technology and Circuits 2023: 1-2

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