"Towards Epitaxial Ferroelectric HZO on n+-Si/Ge Substrates ..."

Zefu Zhao et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185233

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Zefu Zhao, Yu-Rui Chen, Yun-Wen Chen, Wan-Hsuan Hsieh, Jer-Fu Wang, Jia-Yang Lee, Yifan Xing, Guan-Hua Chen, Chee Wee Liu:
Towards Epitaxial Ferroelectric HZO on n⁺-Si/Ge Substrates Achieving Record 2Pr = 84 μC/cm² and Endurance > 1E11. VLSI Technology and Circuits 2023: 1-2

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