"Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and ..."

Tathagata Srimani et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185414

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type: Conference or Workshop Paper

metadata version: 2024-10-06

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Tathagata Srimani, Andrew C. Yu, Robert M. Radway, Dennis Rich, Mark Nelson, Simon S. Wong, Denis Murphy, Samuel Fuller, Gage Hills, Subhasish Mitra, Max M. Shulaker:
Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM. VLSI Technology and Circuits 2023: 1-2

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