"Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping."

Seung Hyun Oh et al. (2024)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46783.2024.10631540

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-17

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Seung Hyun Oh, Changhyeon Lee, Hee Tae Kim, Jeong Ik Park, Min Ju Kim, Se Jun Park, Sung Gap Im, Sung Haeng Cho, Byung Jin Cho:
Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping. VLSI Technology and Circuits 2024: 1-2

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