"DRAM-Peri FinFET - A Thermally-Stable High-Performance Advanced CMOS RMG ..."

J. Ganguly et al. (2024)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46783.2024.10631417

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type: Conference or Workshop Paper

metadata version: 2024-10-17

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J. Ganguly, Hiroaki Arimura, Romain Ritzenthaler, H. Bana, J. W. Maes, J. G. Lai, S. Brus, W. Maqsood, R. Sarkar, B. Kannan, Elena Capogreco, V. Machkaoutsan, S. Yoon, Alessio Spessot, M. Givens, Naoto Horiguchi:
DRAM-Peri FinFET - A Thermally-Stable High-Performance Advanced CMOS RMG Platform with Mo-Based pWFM for sub-10nm DRAM. VLSI Technology and Circuits 2024: 1-2

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