"Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark ..."

Jacopo Franco et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185317

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type: Conference or Workshop Paper

metadata version: 2023-07-28

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Jacopo Franco, Hiroaki Arimura, J.-F. de Marneffe, S. Brus, Romain Ritzenthaler, E. Dentoni Litta, Kris Croes, Ben Kaczer, N. Horiguchi:
Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions. VLSI Technology and Circuits 2023: 1-2

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