"Optical Lithography Simulation with Focus Variation using Wavelet Transform."

Rance Rodrigues, Sandip Kundu (2010)

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DOI: 10.1109/VLSI.DESIGN.2010.67

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Rance Rodrigues, Sandip Kundu:
Optical Lithography Simulation with Focus Variation using Wavelet Transform. VLSI Design 2010: 387-392

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