"Design, Fabrication, Testing and Simulation of Porous Silicon Based Smart ..."

Chirasree Pramanik et al. (2005)

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DOI: 10.1109/ICVD.2005.77

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-29

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Chirasree Pramanik, Tarikul Islam, Hiranmay Saha, J. Bhattacharya, S. Banerjee, Sagnik Dey:
Design, Fabrication, Testing and Simulation of Porous Silicon Based Smart MEMS Pressure Sensor. VLSI Design 2005: 235-240

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