"Hybrid OPC Technique for Fast and Accurate Lithography Simulation."

Pardeep Kumar et al. (2017)

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DOI: 10.1109/VLSID.2017.49

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Pardeep Kumar, S. Srivatsa, P. Mantripragada, S. Upreti, K. V. Shravya:
Hybrid OPC Technique for Fast and Accurate Lithography Simulation. VLSID 2017: 447-450

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