"Silicon-Level Physical Verification of Sub Wavelength(tm) Designs."

Fang-Cheng Chang et al. (1999)

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DOI: 10.1109/ICVD.1999.745221

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Fang-Cheng Chang, Melissa Kwok, Kenneth Rachlin, Robert Pack:
Silicon-Level Physical Verification of Sub Wavelength(tm) Designs. VLSI Design 1999: 603-

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