"Physical design and mask optimization for directed self-assembly ..."

Seongbo Shim, Youngsoo Shin (2015)

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DOI: 10.1109/VLSI-SOC.2015.7314396

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Seongbo Shim, Youngsoo Shin:
Physical design and mask optimization for directed self-assembly lithography (DSAL). VLSI-SoC 2015: 80-85

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