"Methodologies for layout decomposition and mask optimization: A systematic ..."

Yuzhe Ma, Xuan Zeng, Bei Yu (2017)

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DOI: 10.1109/VLSI-SOC.2017.8203477

access: closed

type: Conference or Workshop Paper

metadata version: 2018-10-01

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Yuzhe Ma, Xuan Zeng, Bei Yu:
Methodologies for layout decomposition and mask optimization: A systematic review. VLSI-SoC 2017: 1-6

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