"High-Precision Robotic Arm for Silicon Wafer Handling and Alignment in ..."

Luke Bassett, Maria Apostle, Federica Aveta (2024)

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DOI: 10.1109/UEMCON62879.2024.10754678

access: closed

type: Conference or Workshop Paper

metadata version: 2024-11-29

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Luke Bassett, Maria Apostle, Federica Aveta:
High-Precision Robotic Arm for Silicon Wafer Handling and Alignment in Small-Scale Semiconductor Fabrication. UEMCON 2024: 190-195

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