"Multiphysics Modeling and Characterization of MicroCVD Chip for Growing ..."

Long Zheng et al. (2014)

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DOI: 10.1109/SERE-C.2014.48

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Long Zheng, Yangbing Wu, Dan Zhang, Liwei Lin, Donghui Guo:
Multiphysics Modeling and Characterization of MicroCVD Chip for Growing Carbon Nanomaterials. SERE (Companion) 2014: 252-256

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