"Two-way material transportation method based on 300mm wafer FAB line ..."

Youngshin Han, Chilgee Lee (2010)

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DOI: 10.1145/1878537.1878774

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-09

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Youngshin Han, Chilgee Lee:
Two-way material transportation method based on 300mm wafer FAB line simulation. SpringSim 2010: 227

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