"Analysis and control of wafer delays in a dual-armed cluster tool for a ..."

Dong-Hyun Roh, Tae-Eog Lee (2016)

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DOI: 10.1109/SMC.2016.7844277

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Dong-Hyun Roh, Tae-Eog Lee:
Analysis and control of wafer delays in a dual-armed cluster tool for a K-cyclic schedule. SMC 2016: 418-423

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