"Performance evaluation of the thin film area in an IC wafer fabrication ..."

MuDer Jeng, Chi Liang Chuang, WenYuan Hung (1998)

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DOI: 10.1109/ICSMC.1998.726477

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

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MuDer Jeng, Chi Liang Chuang, WenYuan Hung:
Performance evaluation of the thin film area in an IC wafer fabrication system using Petri nets. SMC 1998: 3094-3099

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