"Using a self-organizing neural network for wafer defect inspection."

Chuan-Yu Chang, Jia-Wei Chang, MuDer Jeng (2004)

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DOI: 10.1109/ICSMC.2004.1401209

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Chuan-Yu Chang, Jia-Wei Chang, MuDer Jeng:
Using a self-organizing neural network for wafer defect inspection. SMC (5) 2004: 4312-4317

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