"Experimental high precision profilometry of high aspect ratio samples."

Bernardo Dantas Aumond, Kamal Youcef-Toumi (1998)

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DOI: 10.1109/ICSMC.1998.727548

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

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Bernardo Dantas Aumond, Kamal Youcef-Toumi:
Experimental high precision profilometry of high aspect ratio samples. SMC 1998: 4435-4440

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