"Test structures for residual stress monitoring in the integrated CMOS-MEMS ..."

Carlos Ramón Báez Álvarez et al. (2016)

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DOI: 10.1109/SMACD.2016.7520745

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga:
Test structures for residual stress monitoring in the integrated CMOS-MEMS process development. SMACD 2016: 1-4

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