"Full-chip routing system for reducing Cu CMP & ECP variation."

Yanming Jia, Yici Cai, Xianlong Hong (2008)

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DOI: 10.1145/1404371.1404386

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yanming Jia, Yici Cai, Xianlong Hong:
Full-chip routing system for reducing Cu CMP & ECP variation. SBCCI 2008: 10-15

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