"Reactive magnetron sputtering: an offline parameter identification method."

András Kelemen, Róbert Rossi Madarász (2021)

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DOI: 10.1109/SACI51354.2021.9465630

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-06

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András Kelemen, Róbert Rossi Madarász:
Reactive magnetron sputtering: an offline parameter identification method. SACI 2021: 357-362

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