"Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride ..."

Carlo Trigona et al. (2024)

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DOI: 10.1109/ROSE62198.2024.10591168

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-01

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Carlo Trigona, Suhail Ahmed Almani, Alireza Mehdi, Giuliano A. Salerno, Vincenzina Strano, Ausrine Bartasyte, Samuel Margueron, Salvatore Baglio, Quentin Micard:
Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices. ROSE 2024: 1-5

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