"Design of a new flexure-based XYZ parallel nanopositioning stage."

Xiaozhi Zhang, Qingsong Xu (2015)

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DOI: 10.1109/ROBIO.2015.7419060

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Xiaozhi Zhang, Qingsong Xu:
Design of a new flexure-based XYZ parallel nanopositioning stage. ROBIO 2015: 1962-1966

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