"Research of micro/nano displacement sensor for piezoelectric actuator."

Bo Song et al. (2008)

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DOI: 10.1109/ROBIO.2009.4913015

access: closed

type: Conference or Workshop Paper

metadata version: 2019-04-03

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Bo Song, Yong Yu, WeiChao Yang, YunJian Ge:
Research of micro/nano displacement sensor for piezoelectric actuator. ROBIO 2008: 269-275

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