"Wafer-level test system using a physical stimulus for a MEMS accelerometer."

Yaqiong Chen et al. (2017)

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DOI: 10.1109/RCAR.2017.8311850

access: closed

type: Conference or Workshop Paper

metadata version: 2020-11-30

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Yaqiong Chen, Zhenhai Zhang, Yantao Shen, Kejie Li:
Wafer-level test system using a physical stimulus for a MEMS accelerometer. RCAR 2017: 145-150

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