"Identification and super-precision control of a linear stage driven by a ..."

Jianfa Wang et al. (2004)

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DOI: 10.1109/RAMECH.2004.1438915

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-12

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Jianfa Wang, Wensheng Yin, Yu Zhu, Guanghong Duan:
Identification and super-precision control of a linear stage driven by a voice coil motor. RAM 2004: 192-196

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