"A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic ..."

Philippe Hélin et al. (2019)

> Home

Details and statistics

DOI: 10.23919/PS.2019.8818059

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ps/HelinFCPLMO19
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ps/HelinFCPLMO19
Philippe Hélin, Andrea Firrincieli, Ashesh Ray Chaudhuri, Nga P. Pham, Silvia Lenci, Manuel Mannarino, Haris Osman:
A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss. OECC/PSC 2019: 1-3

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.