"A feasibility study of AlN ultrasonic transducers fabrication using the ..."

Jesus Yanez et al. (2019)

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DOI: 10.1109/PRIME.2019.8787767

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Jesus Yanez, Francesc Torres, Arantxa Uranga, Núria Barniol:
A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range. PRIME 2019: 293-296

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