"Diagnosis Model of Radio Frequency Impedance Matching in Plasma Equipment ..."

Byungwhan Kim et al. (2006)

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DOI: 10.1007/11801603_121

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Byungwhan Kim, Jae Young Park, Donghwan Kim, Seung Soo Han:
Diagnosis Model of Radio Frequency Impedance Matching in Plasma Equipment by Using Neural Network and Wavelets. PRICAI 2006: 995-999

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