"Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for ..."

Nicholas A. Strnad et al. (2023)

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DOI: 10.1109/PLANS53410.2023.10140027

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-19

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Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp:
Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance. PLANS 2023: 10-17

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