"A piezo-capacitive BAW accelerometer with extended dynamic range using a ..."

Anosh Daruwalla et al. (2018)

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DOI: 10.1109/PLANS.2018.8373392

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-18

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  - conf/plans/DaruwallaWLJA18
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  - https://dblp.org/rec/conf/plans/DaruwallaWLJA18
Anosh Daruwalla, Haoran Wen, Chang-Shun Liu, Hoon Jeong, Farrokh Ayazi:
A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode. PLANS 2018: 283-287

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