"Formation of Low Resistance Contacts to p-type 4H-SiC using Al-Film Source ..."

Kento Okamoto et al. (2019)

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DOI: 10.5220/0007583002940298

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-07

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  dblp key:
  - conf/photoptics/OkamotoKIIA19
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Kento Okamoto, Toshifumi Kikuchi, Akihiro Ikeda, Hiroshi Ikenoue, Tanemasa Asano:
Formation of Low Resistance Contacts to p-type 4H-SiC using Al-Film Source Laser Doping. PHOTOPTICS 2019: 294-298

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