"Parallel Simulation of Coupled Oxidation and Diffusion in VLSI ..."

Matthias G. Hackenberg, Wolfgang Joppich, Slobodan Mijalkovic (1997)

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type: Conference or Workshop Paper

metadata version: 2013-05-26

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Matthias G. Hackenberg, Wolfgang Joppich, Slobodan Mijalkovic:
Parallel Simulation of Coupled Oxidation and Diffusion in VLSI Wafer-Fabrication. PARCO 1997: 211-215

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