"Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using ..."

Qize Zhong et al. (2020)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2020-05-18

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  - https://dblp.org/rec/conf/ofc/ZhongDLLHXZLFBL30
Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, Navab Singh:
Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production. OFC 2020: 1-3

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