"A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated ..."

Sandeep S. Saseendran et al. (2019)

> Home

Details and statistics

DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

- view
  - electronic edition @ ieee.org
- export record
  dblp key:
  - conf/ofc/SaseendranKFBTK19
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ofc/SaseendranKFBTK19
Sandeep S. Saseendran, Tangla D. Kongnyuy, Bruno Figeys, Federico Buja, Benedetto Troia, Sarp Kerman, Aleksandrs Marinins, Roelof Jansen, Xavier Rottenberg, Deniz Sabuncuoglu Tezcan, Philippe Soussan:
A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation. OFC 2019: 1-3

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.