"Three Dimensional Silicon Optical Waveguide Structure Bent by Ion ..."

Youichi Sakakibara, Yuki Atsumi, Tomoya Yoshida (2018)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2023-05-30

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Youichi Sakakibara, Yuki Atsumi, Tomoya Yoshida:
Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling. OFC 2018: 1-3

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