"Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, ..."

Xinru Ji et al. (2024)

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type: Conference or Workshop Paper

metadata version: 2024-06-06

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Xinru Ji, Rui Ning Wang, Yang Liu, Johann Riemensberger, Zheru Qiu, Tobias J. Kippenberg:
Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits. OFC 2024: 1-3

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