"Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon ..."

Kenneth M. Jabon et al. (2021)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-03

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Kenneth M. Jabon, Christopher V. Poulton, Ren-Jye Shiue, Matthew J. Byrd, Zhan Su, Mohammad H. Teimourpour, Scott Breitenstein, Ronald P. Millman, Dogan A. Atlas, Michael R. Watts, Erman Timurdogan:
Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers. OFC 2021: 1-3

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