"Sensitivity improvement for silicon MS-SW BG sensors by waveguide height ..."

Siim Heinsalu et al. (2021)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-03

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Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka:
Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. OFC 2021: 1-3

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