"Effects of an interfacial dead layer on the ferroelectric HfZrOx films for ..."

Seung-Yeol Oh, Hojung Jang, Hyunsang Hwang (2022)

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DOI: 10.1109/NVMTS57339.2022.10229803

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-06

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Seung-Yeol Oh, Hojung Jang, Hyunsang Hwang:
Effects of an interfacial dead layer on the ferroelectric HfZrOx films for low thermal budget. NVMTS 2022: 1-5

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